| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas discharge laser light source electrode having a high repetition rate and high power. <P>SOLUTION: A gas discharge laser light source electrode can include a laser chamber and an electrode element forming a cathode and an anode. Each of cathode and anode has a discharge acceptance region. The discharge acceptance region forms two longitudinal edges. The anode includes a first long and slender anode portion, which is entirely located in the discharge acceptance region of the anode and includes first anode material specifying an erosion rate of the first anode material, a pair of second long and slender anode portions, which are located at each side and at least a part of the first anode portion in the discharge acceptance region, respectively, and includes a second anode material specifying the erosion rate of the second anode material, and a long and slender electrode center base portion integrated with the first long and slender anode portion. Each pair of the second long and slender anode portions is mechanically joined to the center base portion. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
