发明名称 |
CLOSED LOOP COMPENSATION SYSTEM AND METHOD |
摘要 |
Closed loop compensation for a defopnable mirror having an array of spaced actuators is achieved by: mapping an array of spaced sensors in optical space to reside between pairs of the actuators; focusing sub-apertures of a wavefront from the defopnable mirror onto individual ones of the spaced array of sensors; setting a first actuator to an adjusted stroke position; and adjusting the stroke of subsequent actuators to locate, to a pre-established position, the focused sub-aperture on a sensor in the pathway between each particular subsequent actuator and a neighboring previously adjusted portion of the mirror to compensate for sub-aperture tilt while maintaining relative phase between sub- apertures.
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申请公布号 |
WO2007081762(A3) |
申请公布日期 |
2007.11.29 |
申请号 |
WO2007US00208 |
申请日期 |
2007.01.04 |
申请人 |
XINETICS, INC;SMITH, MARK, ANDERSON |
发明人 |
SMITH, MARK, ANDERSON |
分类号 |
G01J1/20 |
主分类号 |
G01J1/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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