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发明名称
Reinigungs- und Trocknungsvorrichtung von zu behandelnden Gegenständen
摘要
申请公布号
DE69837364(T2)
申请公布日期
2007.11.29
申请号
DE1998637364T
申请日期
1998.06.15
申请人
TOKYO ELECTRON LTD.
发明人
KAMIKAWA, YUJI
分类号
H01L21/00;B08B3/04
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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