发明名称 IMAGE SENSOR, AND METHOD OF FABRICATING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an image sensor and a method of fabricating the same. SOLUTION: The method of fabricating the image sensor includes forming at least one gate on a substrate, and forming first, second and third layers on the at least one gate. The method includes first etching at least a portion of the third layer, by using the second layer as an etching stop layer, exposing at least a portion of the second layer, and second etching at least the exposed portion of the second layer, by using the first layer as an etching stop layer. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007311804(A) 申请公布日期 2007.11.29
申请号 JP20070132022 申请日期 2007.05.17
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 SONG JAE-HO;KIM JONG-CHAE;HONG JONG-WOOK;PARK KEO SUNG
分类号 H01L27/146;H04N5/335;H04N5/361;H04N5/369;H04N5/374 主分类号 H01L27/146
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