| 摘要 |
PROBLEM TO BE SOLVED: To obtain the timing of maintenance accurately in a semiconductor production system. SOLUTION: In order to detect the quantity of deposit in the exhaust pipe 10 of a semiconductor production system, temperature sensors (20, 30) for detecting the temperature of the exhaust pipe 10 are provided. Based on the memory information about correlation of pressure, temperature, and thickness of deposit predetermined depending on the type of processing gas and the temperature information obtained by the temperature sensors 20 and 30, the thicknessαof deposit in the exhaust pipe 10 is calculated and when the calculation value reaches a limit deposit thickness, necessity of maintenance is informed by an informing means 100. Since the thickness of deposit can be detected accurately depending on the type of processing gas, optimal timing of maintenance can be known without waste resulting in enhancement of efficiency and yield of the semiconductor production system. COPYRIGHT: (C)2008,JPO&INPIT
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