| 摘要 |
PROBLEM TO BE SOLVED: To surely irradiate ionization laser to particles, while the structure is simple, and to prevent wrong irradiation of the laser. SOLUTION: This analyzer is equipped with a particle-moving means 2 for moving particles which are measuring objects to a prescribed direction, a light source 31 for irradiating an inspection light L to the particles S, a photodetector 32 for detecting scattered light LS generated by irradiation of the inspection light L, a particle size calculating section 61 for receiving a light intensity signal outputted from the photodetector 32 and calculating the particle size of the particles S based on the value of the light intensity signal, an ionization section 4 for irradiating an energy beam EL, from a direction opposite to the moving direction with respect to the particles S, to which the inspection light L is irradiated and then ionizing the particles S, and a mass spectrometer section 5 for performing mass spectrometry on the ionized particles. The mass spectrometer part 5 is equipped with an irradiation timing determination part 63 for receiving the light intensity signal from the photodetector 32, and determining the irradiation timing of the energy beam EL, by using the time waveform of the signal as a parameter. COPYRIGHT: (C)2008,JPO&INPIT
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