发明名称 NEW AND IMPROVED ION SOURCE
摘要 An exemplary ion source for creating a stream of ions has an aluminum alloy arc chamber body that at least partially bounds an ionization region of the arc chamber. The arc chamber body is used with a hot filament arc chamber housing that either directly or indirectly heats a cathode to sufficient temperature to cause electrons to stream through the ionization region of the arc chamber. A temperature sensor monitors temperatures within the arc chamber and provides a signal related to sensed temperature. A controller monitors sensed temperature as measured by the sensor and adjusts the temperature to maintain the sensed temperature within a range.
申请公布号 WO2007136722(A2) 申请公布日期 2007.11.29
申请号 WO2007US11863 申请日期 2007.05.17
申请人 AXCELIS TECHNOLOGIES, INC.;VANDERBERG, BO;BENVENISTE, VICTOR;FALLON, JOHN;POKIDOV, ILYA 发明人 VANDERBERG, BO;BENVENISTE, VICTOR;FALLON, JOHN;POKIDOV, ILYA
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