发明名称 |
TECHNIQUE FOR IMPROVING PIRANI GAUGE TEMPERATURE COMPENSATION OVER ITS FULL PRESSURE RANGE |
摘要 |
A method and apparatus are provided for achieving nearly perfect temperature compensation of a heat-loss vacuum gauge over its full pressure range. A voltage is measured across a sensor leg, a sensor leg and a temperature compensating leg connected together in series, or a sensor leg and a fixed resistive leg coupled together in series. A voltage is also measured across a subleg of the temperature compensating leg. The temperature compensating leg may include a temperature sensitive subleg and a temperature stable subleg connected together in series. The sublegs may include one or more temperature sensitive and/or temperature stable elements. The measured voltages are combined to produce temperature independent pressure indications over a pressure range. Three- dimensional curve-fitting or similar techniques may be used to combine the measured voltages. |
申请公布号 |
WO2007089516(A3) |
申请公布日期 |
2007.11.29 |
申请号 |
WO2007US01973 |
申请日期 |
2007.01.25 |
申请人 |
BROOKS AUTOMATION, INC.;BORENSTEIN, MICHAEL, D. |
发明人 |
BORENSTEIN, MICHAEL, D. |
分类号 |
G01L21/12 |
主分类号 |
G01L21/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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