| 摘要 |
<p>A stage device, an exposure device and a manufacturing method of a micro device are provided to improve a positioning accuracy of the stage and a exposure accuracy by reducing measuring error of a interference system according to a temperature variation. A stage driver(11) is able to be moved along a base(12) without contacting with the base. Interference systems(15,16,17) are constituted to measure a position of the stage driver. A stage driver comprises at least one pipe lines or wirings which are connected to the stage driver, and at least one heat insulating material or a heat reclamation unit which are composed to reduce the heat transmitting to a space where a measured light of the interference system is passed from the pipe lines and wirings.</p> |
