| 摘要 |
<P>PROBLEM TO BE SOLVED: To determine an appropriate replacement timing of each of a plurality of consumables in an EUV light source and reduce running cost of an exposure device. <P>SOLUTION: In the method of determining the consumables replacement timing, the values obtained by detecting means 109, 301 to detect parameters of expressing the state of the EUV light source 100 are compared with threshold values established same number as the consumables 106, 107. Based on whether the values obtained by the detecting means are more than any of the threshold values or not, it is judged which consumables are replaced. <P>COPYRIGHT: (C)2008,JPO&INPIT |
