发明名称 NITRIDE SEMICONDUCTOR LIGHT EMITTING ELEMENT, EPI-WAFER, AND MANUFACTURING METHOD THEREOF
摘要 <P>PROBLEM TO BE SOLVED: To improve light emitting life and light intensity of a nitride semiconductor light emitting element, and to prevent cracks from occurring therein. <P>SOLUTION: The nitride semiconductor light emitting element includes: a substrate having recess portions and projection portions on the surface thereof, which are made of single material; and a nitride semiconductor multilayer structure grown on the substrate. The nitride semiconductor light emitting element has light emitting portions above each of the projection portions and recesses above each of the recess portions formed on the surface thereof, being not buried perfectly by means of crystal growth, wherein the substrate of which projection portions and recess portions are made of the single material, is composed of a nitride semiconductor layer grown on a substrate except for the nitride semiconductor, and the width of the recess is narrower than the width of the corresponding recess portion. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007311833(A) 申请公布日期 2007.11.29
申请号 JP20070227576 申请日期 2007.09.03
申请人 SHARP CORP 发明人 TSUDA YUZO;HANAOKA DAISUKE;YUASA TAKAYUKI;ITO SHIGETOSHI;TANETANI MOTOTAKA
分类号 H01S5/343;H01L33/06;H01L33/32 主分类号 H01S5/343
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