| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a static electricity MEMS drive device with lowest position sensitivity. <P>SOLUTION: The Micro Electro Mechanic System (MEMS) closed loop inertial device 38 includes a vertical comb drive device which shows improved performance under vibration. This device includes one or more stator teeth 46 extending in cavity formed by housing from housing 48. Rotor teeth 44 extends from proof mass 42 arranged in the cavity. The proof mass is joined with the housing by flexure which can vertically transfer. The rotor teeth has first length value in traveling direction, while the stator teeth has 2nd length value in traveling direction. The second length value is larger than the first one. The stator teeth contains two electrically-separated parts. As the rotor teeth is shorter than the stator teeth, attraction force between rotor teeth and upper or lower half part of the stator teeth does not depend on rotor vertical position. <P>COPYRIGHT: (C)2008,JPO&INPIT |
