| 发明名称 |
PFC GAS TREATMENT METHOD AND APPARATUS |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To inhibit the corrosion of an exhaust line for discharging gas after washing PFC decomposition gas. <P>SOLUTION: A mist separator is installed downstream of a washing tower for washing the decomposition gas of PFC. By removing mist from the washing gas, the corrosion of the exhaust line can be inhibited. <P>COPYRIGHT: (C)2008,JPO&INPIT |
| 申请公布号 |
JP2007307556(A) |
申请公布日期 |
2007.11.29 |
| 申请号 |
JP20070147612 |
申请日期 |
2007.06.04 |
| 申请人 |
HITACHI LTD |
发明人 |
SUGANO SHUICHI;YAMASHITA HISAO;MIYAMOTO TOMOHIKO;TAMADA SHIN;SHIBANO YOSHIKI;KOMURO TAKEO;YUKITAKE TSUGITA;KAWASAKI TERUFUMI |
| 分类号 |
B01D53/50;B01D45/12;B01D46/10;B01D53/56;B01D53/60;B01D53/68;B01D53/70;B01D53/77;B01D53/86;C07B35/06;F23G7/06 |
主分类号 |
B01D53/50 |
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