| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for treating at least a lower surface of a disk-shaped object, which can avoid contamination of the disk-shaped object. SOLUTION: The device is provided with a rotatable holder (2) with an upper surface (2o) in which at least two members (19) for positioning the disk-shaped object (1) vertically project from the upper surface; at least one piping (24, 26) which is fixedly provided to supply a treatment medium in a lower surface (1u) of the disk-shaped object (1) and is arranged so as to penetrate the holder (2); and a cover (4) which is arranged so as to be separated from at least one part of a lower surface (2u) of the holder (2) and forms an annular gap (16). The at least one piping (24, 26) penetrates the cover (4) without any gap. COPYRIGHT: (C)2008,JPO&INPIT
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