| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and device for detecting the position of an object capable of improving precision of pattern matching, and capable of precisely detecting the position of the object. <P>SOLUTION: The substrate 10 is photographed with a substrate recognition camera, part 10a of the image is registered as a template image A. If there exists difference between the fixing angles of the camera when the template image is taken photographed and when the substrate image for pattern matching is taken photographed, the registered template image A is corrected corresponding to the difference between the fixing angles so that the position detection may be performed by the pattern matching with the corrected template image. By this constitution, even in the case the fixing angle is including an error, the highly precise position detection by the pattern matching can be performed. <P>COPYRIGHT: (C)2008,JPO&INPIT |
