| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermopile having improved sensitivity to an infrared ray. <P>SOLUTION: In this thermopile 1 having a silicon substrate and an insulating film 3 laminated on the surface of the silicon substrate, a hollow part is provided by etching and removing the back center of the silicon substrate, and thereby a membrane 5 formed in a rectangular shape in a plan view is provided, and the periphery of the membrane 5 is formed as a heat sink. A plurality of thermocouples 7 constituted by coupling two kinds of conductive pieces 8, 9 respectively are arranged in the mutually connected state in series on the surface of the insulating film 3. Hot junctions 7a of each thermocouple 7 are arranged approximately over the whole diagonal near the diagonal of the rectangular membrane 5. Cold junctions 7b of each thermocouple 7 are arranged in a domain of the periphery of the membrane 5. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
