| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck table mechanism including a function of removing static electricity charged on a protective tape stuck to an object to be worked. SOLUTION: The electrostatic chuck table mechanism includes a chuck table including a holding surface for holding the object to be worked, an electrode provided inside the chuck table for generating an electric charge with voltage applied, and a voltage applying means for applying the voltage to the electrode. It includes an air supply path formed on the chuck table and opened on the holding surface, and an ionized air supply means for supplying ionized air to the air supply path. COPYRIGHT: (C)2008,JPO&INPIT |
