| 摘要 |
PROBLEM TO BE SOLVED: To perform highly-sensitive defect detection, even if the direction of a repeated pattern is unknown. SOLUTION: This device includes a means for illuminating a repeated pattern formed on the surface of an inspection substrate by linearly polarized light, a means (S1, S7) for setting an angle formed between the direction on the surface of a vibration surface of the linearly polarized light and the repeated direction of the repeated pattern at a plurality of different angles, a means (S2, S3) for measuring the light intensity of a polarized component crossing the vibration surface of the linearly polarized light in regularly reflected light generated from the repeated pattern in each state set at an oblique angle, and a means (S5, S6) for detecting a defect of the repeated pattern based on the maximum value in each light intensity measured in each state. COPYRIGHT: (C)2008,JPO&INPIT
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