| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor device capable of detecting also an absolute pressure, as the sensor device equipped with a diaphragm. SOLUTION: This sensor device includes a vibrating film 4 vibratably provided, an electrostatic electrode 5a and strain resistance elements 6a, 6b formed on the vibrating film 4, and an electrode 9a arranged in the facing state to the electrostatic electrode 5a. The vibrating film 4 is moved to the electrode 9a side by an electrostatic force generated between the electrostatic electrode 5a and the electrode 9a, and the vibrating film 4 is put into the protrusively bent state, and a pressure is converted into an electric signal, based on resistance fluctuation of the strain resistance elements 6a, 6b in the moved state. COPYRIGHT: (C)2008,JPO&INPIT
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