| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection head device provided with a protective window member for separating the reflected light from an inspection target of inspection light from the reflected light from the protective window member to guide the same to an inspection device. SOLUTION: In the surface inspection head device 3 equipped with an outer cylinder 30 having an opening 31 formed to its outer periphery, the protective window member 33 provided to the opening 31 and the mirror 32 provided in the outer cylinder 30 to alter not only the light path of the inspection light penetrated in the axial direction of the outer cylinder 30 toward the protective window member 33 but also the light path of the reflected light of the inspection light on the surface of the inspection target 4 to the direction opposite to the inspection light along the axial direction of the outer cylinder 30, the normal line direction of at least one of the surface 33a and back 33b of the protective window member 33 is inclined with respect to the incident direction of the inspection light on the protective window member 33. COPYRIGHT: (C)2008,JPO&INPIT
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