| 摘要 |
The present invention is an apparatus for evaluating a semiconductor wafer in order to evaluate an electric characteristic thereof, comprising, at least, a wafer cassette section on which a wafer cassette for storing the semiconductor wafer that is an object to be evaluated is placed, a wafer pretreatment section for pretreating the semiconductor wafer in order to evaluate the electric characteristic thereof, a mercury probe section for evaluating the electric characteristic of the semiconductor wafer by using a mercury probe, and an automatic transport part for transporting the semiconductor wafer to each of the sections. Thereby, there is provided an evaluation apparatus by which when an electric characteristic of a semiconductor wafer is evaluated, the electric characteristic of the semiconductor wafer or the like can be accurately evaluated with preventing contamination such as particles from adhering to a main surface of the semiconductor wafer and further the evaluation efficiency is high.
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