INSPECTION HEAD SUPPORTING STRUCTURE IN SURFACE INSPECTING APPARATUS, AND SURFACE INSPECTING APPARATUS

摘要

A pair of angular contact bearings are provided between a bearing house and a head supporting cylinder of an inspection head, and a spacer and a bearing ring are arranged between the outer rings of the bearings. The spacer and the spring bearing ring are urged to the outer ring side by a coil spring. An o-ring is arranged between the spacer and the outer ring of the bearing, and the outer circumference is adhered to the inner circumference of the bearing house. The outer rings are bundled by a step inside the bearing house and an end cap screwed into the inspection head. The bearing housing and a main shaft section are permitted to be integrally taken out from the bearing by removing the end cap. The inspection head is provided with a head main body attached to a drive mechanism, and a supporting section which is removably arranged to the head main body and supports a mirror.