发明名称 |
STRIPPER COMPOSITION FOR PHOTORESIST |
摘要 |
<p>A photoresist stripper composition, a method for stripping a photoresist containing aluminum copper or aluminum and copper on a substrate by using the composition, and a method for preparing a liquid crystal display device and a semiconductor device by using the stripping method are provided to remove a photoresist layer without damaging an under conductive layer or an insulating layer even if isopropanol is not used. A photoresist stripper composition comprises at least one corrosion inhibitor selected from the group consisting of compounds represented by the formulae 1, 2 and 3; a water-soluble organic amine compound in an amount of 2-50 times to the amount of the corrosion inhibitor by weight; and a polar solvent, wherein R1 and R2 are identical or different each other and are independently H or OH; R3 is H, a t-butyl group, a carboxyl group, a methyl ester group, an ethyl ester group, or a propyl ester group; r4 is H or a C1-C4 alkyl group; and R5 and R6 are identical or different each other and are independently a C1-C4 hydroxyalkyl group.</p> |
申请公布号 |
KR20070114037(A) |
申请公布日期 |
2007.11.29 |
申请号 |
KR20070050844 |
申请日期 |
2007.05.25 |
申请人 |
LG CHEM. LTD. |
发明人 |
HAN, HEE;PARK, MIN CHOON;KIM, KYUNG JUN;SEO, SUNG WOO;KWON, HYOK JOON;AHN, KYOUNG HO;CHOI, BYUNG KYU;MIN, SUNG JOON;HWANG, JI YOUNG |
分类号 |
G03F7/42;H01L21/027;H01L21/306 |
主分类号 |
G03F7/42 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|