APPARATUS AND METHOD FOR MANUFACTURING A SPECIMEN FOR TEM

摘要

A manufacturing system for an analysis sample of a transmission electron microscope and a method of manufacturing thereof are provided to reduce a process time for the analysis sample by confirming a processing state on a real time, and to control the process automatically. An analysis sample(10) is fixed by a mount(20). A process unit includes a process wheel(30) for processing an analysis region of the analysis sample. A light source(42) irradiates a light to the analysis region of the analysis sample. A controller(60) controls a processing degree of the analysis region by using the light transmitting the analysis region.