Dual Index Unit and Transfer Unit for Transferring Workpiece Using the Same,申请号KR20060015855-传众专利搜索

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发明名称	Dual Index Unit and Transfer Unit for Transferring Workpiece Using the Same
摘要
申请公布号	KR100780800(B1)	申请公布日期	2007.11.29
申请号	KR20060015855	申请日期	2006.02.17
申请人		发明人
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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