发明名称 ELECTRONIC APPARATUS AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a transistor employing a carbon nano-tube bundle by simultaneously direction-controlling the bundle of hundreds and thousands of carbon nano-tubes to form them in a horizontally direction. SOLUTION: The transistor has an insulating film 2 formed on a substrate 1, the carbon nano-tube bundle 4 extending along the upper surface of the insulating film 2, an opening formed on the insulating film 2, and a catalyst layer 3 formed so as to be closer to the side wall of the opening on one part region of the substrate 1 exposed in the opening. The carbon nano-tube bundle 4 extending along the upper surface of the insulating film 2 is bent, its one end contacts with the catalyst layer 3, and the carbon nano-tube bundle 4 constitutes a channel. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007311710(A) 申请公布日期 2007.11.29
申请号 JP20060141721 申请日期 2006.05.22
申请人 FUJITSU LTD 发明人 AWANO YUJI
分类号 H01L29/06;C01B31/02;H01L21/28;H01L29/417;H01L29/786;H01L29/80;H01L29/861 主分类号 H01L29/06
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