| 摘要 |
PROBLEM TO BE SOLVED: To provide a cluster treatment device capable of completely protecting a steel layer from oxide formation. SOLUTION: The cluster treatment device includes: a casing 200; at least one treatment chamber 210; a robot 220; and at least one of valves 230, 240. The casing 200 includes gas inside the casing, and has at least one door 203 for putting a lid on the opening of the casing. The gas contains at least one reducing gas. The robot 220 is provided in the casing 200, and conveys a substrate 270 between the door 203 and the treatment chamber 210. The valves 230, 240 are connected to the casing 200. COPYRIGHT: (C)2008,JPO&INPIT
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