| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor terminal system which reduces connections of signal lines by superposing a monitor signal on common data signal lines 7 and 8 and reduces electric energy during operation by dividing operation periods of respective sensor slave stations in terms of time and performs detection without interposing a sensor between detection objects. SOLUTION: The sensor terminal is configured so as to detect a thin plate-like glass board, a printed board, or a semiconductor substrate, by detecting presence and position information thereof at their side surfaces without interposing sensor slave stations between them when conveying by a robot, storing and managing the thin plate-like glass board, the printed board, or the semiconductor substrate on a shelf-like storage such as a stocker. COPYRIGHT: (C)2008,JPO&INPIT
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