| 摘要 |
PROBLEM TO BE SOLVED: To provide a method or the like of manufacturing a wire grid polarizer manufacturing a wire grid polarizer having a fine gap between wire grids. SOLUTION: The method of manufacturing the wire grid polarizer has a step of forming a laminate which is structured by forming a plurality of conductor layers 121 projectingly parallel to each other on the surface of a quartz substrate 11 and has a rugged surface formed including the conductor layers 121 wherein each conductor layer is provided with an oxidation preventive layer 131 on the upper surface, an anodization step for forming an anodic oxidation hole 124 having cylindrical inner wall surface 122 by anodically oxidizing projecting both ends of the conductor layer 121 in the width direction, a belt-like groove part forming step for forming a belt-like groove part 125 on the surface of the quartz substrate 11 by applying etching from the oxidation preventive layer 131 side and a belt-like conductor layer forming step for filling a conductive material into the belt-like groove part 125 to form a belt-like conductor layer 141. COPYRIGHT: (C)2008,JPO&INPIT
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