MULTILAYERED THIN FILM AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a multilayered thin film covering fine holes of a self-standing thin film. SOLUTION: Dry bubble films are formed in the fine holes of the self-standing thin film, and a specified material is deposited on one face of the self-standing thin film, and furthermore, another substance is deposited to manufacture the multilayered thin film. COPYRIGHT: (C)2008,JPO&INPIT