发明名称 FREE-STANDING ELECTROSTATICALLY-DOPED CARBON NANOTUBE DEVICE AND METHOD FOR MAKING SAME
摘要 A method and associated structure for forming a free-standing electrostatically-doped carbon nanotube device is described. The method includes providing a carbon nanotube on a substrate in such a way as to have a free-standing portion. One way of forming a free-standing portion of the carbon nanotube is to remove a portion of the substrate. Another described way of forming a free-standing portion of the carbon nanotube is to dispose a pair of metal electrodes on a first substrate portion, removing portions of the first substrate portion adjacent to the metal electrodes, and conformally disposing a second substrate portion on the first substrate portion to form a trench.
申请公布号 US2007275487(A1) 申请公布日期 2007.11.29
申请号 US20070695982 申请日期 2007.04.03
申请人 GENERAL ELECTRIC COMPANY 发明人 LEE JI U.
分类号 H01L21/00;H01L29/12;H01L29/26;H01L33/18;H01L33/24;H01L33/34;H01L51/00;H01L51/30;H01L51/40 主分类号 H01L21/00
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