发明名称 |
ALIGNED EMBOSSED DIAPHGRAGM BASED FIBER OPTIC SENSOR |
摘要 |
<p>The present invention is a diaphragm-fiber optic sensor (DFOS), interferometric sensor. This DFOS is based on the principles of Fabry-Perot and Michelson/Mach-Zehnder. The sensor is low cost and is designed with high efficiency, reliability, and Q-point stability, fabricated using MEMS (micro mechanic- electrical system) technology, and has demonstrated excellent performance. A DFOS according to the invention includes a cavity between two surfaces: a diaphragm made of silicon or other material with a rigid body (or boss) at the center and clamped along its edge, and the endface of a single mode optic fiber. By utilizing MEMS technology, the gap width between the diaphragm and the fiber endface is made accurately, ranging from 1 micron to 10 microns. To stabilize the Q-point of the DFOS when in use as an acoustic sensor, a system of microchannels is built in the structure of the diaphragm so that the pressure difference on two sides of the diaphragm is kept a constant, independent of the hydraulic pressure and/or low frequency noise when the device is inserted in liquid mediums.</p> |
申请公布号 |
WO2007136779(A2) |
申请公布日期 |
2007.11.29 |
申请号 |
WO2007US11955 |
申请日期 |
2007.05.18 |
申请人 |
NEW JERSEY INSTITUTE OF TECHNOLOGY;CHIN, KEN, K.;FENG, GUANHUA;PADRON, IVAN;ROMAN, HARRY |
发明人 |
CHIN, KEN, K.;FENG, GUANHUA;PADRON, IVAN;ROMAN, HARRY |
分类号 |
G01J3/26 |
主分类号 |
G01J3/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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