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发明名称
Mischungen von Metallsiloxiden als einzige Quelle
摘要
申请公布号
DE60316903(D1)
申请公布日期
2007.11.29
申请号
DE20036016903
申请日期
2003.08.28
申请人
AIR PRODUCTS AND CHEMICALS INC.
发明人
CLARK, ROBERT D.;HOCHBERG, ARTHUR KENNETH
分类号
C07F7/00;H01L21/316;C07F7/08;C07F7/10;C08G77/00;C09D1/00;C23C;C23C16/18;C23C16/40;C23C16/42
主分类号
C07F7/00
代理机构
代理人
主权项
地址
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