DIELECTRICALLY TRANSDUCED SINGLE-ENDED TO DIFFERENTIAL MEMS FILTER

摘要

A MEMS filter ( 128) has an input layer (74) for receiving a signal input (Vin), and an output layer (182) for providing a signal output The MEMS filter ( 128) also has a first resonator ( 130) and a second resonator (132) coupled to the first resonator (130) such that movement transduced in the first resonator ( 130) by the signal input causes movement of the second resonator (132) that transduce the signal output A method of manufacturing a MEMS filter is also disclosed A dielectric layer is formed on a base A patterned electrode layer is formed at least in part on the dielectric layer The base is etched to define a resonator structure A method of adjusting a desired input impedance and output impedance of a dielectrically transduced MEMS filter having transduction electrodes coupled to a dielectric film is further disclosed The method includes adjusting a DC bias voltage on the transduction electrodes.