| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck in which generation of particles and contamination of a planar sample with particles are eliminated, and the planar sample can be separated immediately by discharging the charge of the planar sample and the electrostatic chuck immediately. SOLUTION: The electrostatic chuck 1 comprises a mounting plate 2, a supporting plate 3, internal electrodes 4 and 4 for electrostatic attraction, power supply terminals 5 and 5, a residual charge discharging terminal 6 penetrating the mounting plate 2 and the supporting plate 3 and fitting them integrally, and an insulating material layer 7. The residual charge discharging terminal 6 is constituted of a first terminal 11 having one end 11a flush with the mounting surface 2a, and fitted to the mounting plate 2 integrally; a second terminal portion 12 fitted to the supporting plate 3 integrally; and a conductive member 13 for connecting the first and second terminal portions 11 and 12 electrically. COPYRIGHT: (C)2008,JPO&INPIT |
