| 摘要 |
PROBLEM TO BE SOLVED: To provide a sticking method and apparatus therefor in which objects to be bonded are highly accurately stuck while relaxing an impulse load and an eccentric load when sticking plate-like objects to be bonded. SOLUTION: An elastic body 7 is provided in a head 12 which is elevated and driven by a driving part, or in a stage 13 which holds one object to be bonded so as to relax the impulse load or eccentric load when two objects to be bonded are brought into contact with each other, and the two objects to be bonded are stuck together with a load required for bonding after temporary pressurization due to a load detecting means 9 and a control amplifier 10, until a load value becomes uniform. COPYRIGHT: (C)2008,JPO&INPIT
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