| 摘要 |
[PROBLEMS] To provide a vacuum pump where stationary blades and rotating blades do not interfere with each other even if the stationary blades are cut and formed into a semi-circular shape by inexpensive cutting or grinding method without relying upon wire electric discharge machining that provides a small cutting width. [MEANS FOR SOLVING THE PROBLEMS] The distance h from a reference end face (12ta, (12tb)) of a stationary blade outer ring part (12a) to a plane including a corresponding rotor end face (4aa, (4ab)) is set larger than the range of deformation of the rotating blades (4a) during operation of the pump. It may happen in an assembly process that the semi-circular cutting width w of the stationary blades (12) is large to cause the stationary blades (12) to be radially displaced from a ring-like spacer (13) and the outer ring part (12a) to be projected into a space between each rotating blade (4a) and the stationary blade (12). However, even in such a case, the outer ring part (12a) of the rotating blade (12) does not collide with the rotating blades (4a) during operation. Since the outer ring part (12a) and the rotating blades (4a) do not interfere with each other even if the semi-circular cutting width w of the stationary blade (12) is large, the stationary blade (12) can be economically cut into the semi-circular shape by cutting using a cutter etc. and grinding, without using expensive wire electric discharge machining. Also, the pump can be assembled easily. |
