MOTION-SENSITIVE DEVICE COMPRISING AT LEAST ONE TRANSISTOR
摘要
The invention concerns a detection device (2) via at least one transistor with a vertical canal consisting of a mechanical structure (14) mobile in relation to the transistor in a plane containing the drain (10) the source (8) and the canal (12) of the transistor.
申请公布号
WO2007135064(A1)
申请公布日期
2007.11.29
申请号
WO2007EP54775
申请日期
2007.05.16
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE;OLLIER, ERIC;DURAFFOURG, LAURENT;ANDREUCCI, PHILIPPE
发明人
OLLIER, ERIC;DURAFFOURG, LAURENT;ANDREUCCI, PHILIPPE
