发明名称 STRUCTURE AND METHOD FOR MAKING HIGH DENSITY MOSFET CIRCUITS WITH DIFFERENT HEIGHT CONTACT LINES
摘要 Embodiments herein present a structure, method, etc. for making high density MOSFET circuits with different height contact lines. The MOSFET circuits comprise a contact line (500, 1300), a gate (310, 1210) situated proximate the contact line (500, 1300). The contact line (500, 1300) comprises a height that is less than the height of the gate (310, 1210). The MOSFET circuits further comprise gate spacers (710, 715, 1610, 1615) situated proximate the gate (310, 1210) and no contact line spacer situated proximate the contact line (500, 1300) and between the contact line (500, 1300) and the gate (310, 1210).
申请公布号 WO2007082199(A3) 申请公布日期 2007.11.29
申请号 WO2007US60265 申请日期 2007.01.09
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;ZHU, HUILONG 发明人 ZHU, HUILONG
分类号 H01L23/48 主分类号 H01L23/48
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