DISPOSABLE LINERS FOR ETCH CHAMBERS AND ETCH CHAMBER COMPONENTS

摘要

Disposable liners for shielding semiconductor reactor chamber components from erosion in the reactor chamber. More specifically, disposable metal liners and a method of forming such liners wherein the disposable liners have a dielectric material on a surface of the liners to protect semiconductor reactor chamber components from erosion. The disposable liners are formed from a metal sheet (10) that conforms to a surface of a chamber component wherein the metal sheet (10) is subsequently oxidized in an electrolyte free from contaminants using plasma electrolytic oxidation.