| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce scratches on an object to be polished in finish polishing. <P>SOLUTION: A base material layer 2 formed of a nonwoven fabric, an intermediate layer 4 formed of a resin film on this base material layer 2, and a nap layer 5 directly formed on this intermediate layer 4 are provided. Fiber 7 forming the nonwoven fabric of the base material layer 2 is prevented from entering the nap layer 5 side by the intermediate layer 4, and thus, the fiber 7 forming the non-woven fabric is prevented from entering the nap layer 5 which is a polishing layer, or going through it. This reduces the scratches on the object to be polished caused by the fiber 7 of the base material layer 2. <P>COPYRIGHT: (C)2008,JPO&INPIT |
