PIEZOELECTRIC THIN FILM RESONATOR, AND HIGH FREQUENCY FILTER AND HIGH FREQUENCY MODULE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a structure of a piezoelectric thin film resonator capable of extending a fractional band-width.

SOLUTION: The piezoelectric thin film resonator is provided with: a substrate 1; a lower electrode layer 2 arranged on the substrate 1; a lower piezoelectric layer 3 arranged on the lower electrode layer 2; a cord electrode 4 arranged on the lower piezoelectric layer 3; an upper piezoelectric layer 5 arranged on the cord electrode 4 and an upper electrode layer 6 arranged on the upper piezoelectric layer 5.

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