| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance detection precision and detection sensitivity by restraining the motion in the direction of rotation that is unnecessary, when vibrators operate. <P>SOLUTION: An inertial sensor 1 is provided with elastic supporters 102, each of which keeps one end supported by support members 103 on a first substrate 100, vibrators 101 separated from the first substrate 100 and supported by the other end of each elastic supporter 102, and displacement detectors (detection electrodes 108, 120) which detect displacements of the vibrators 101 and output signals. In the sensor, relational expression (Lu-Lj)×Fu=(Ld+Lj)×Fd is satisfied, when the Lorentz force generated in the upper part of each vibrator 101 is Fu, the Lorentz force generated in the lower part of the vibrator 101 is Fd, the distance from the center of gravity of the vibrator 101, up to the support point of the vibrator 101 is Lj, the distance up to the driving point in the upper part of the vibrator 101 is Lu, and the distance up to the driving point in the lower part of the vibrator 101 is Ld; and a thin-film magnetic substance 110 is formed in each vibrator 101. <P>COPYRIGHT: (C)2008,JPO&INPIT |
