| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining device having high productivity by taking notice that the longer the focal depth of a laser beam condensed with an objective condensing lens, the larger working effect. <P>SOLUTION: This laser beam machining device is provided with a chucking table for holding a workpiece, a laser beam radiating means for radiating a pulse beam to the workpiece held on the chucking table and the laser beam radiating means is provided with a laser beam oscillating means 53 and the objective condensing lens 541 for condensing a laser beam LB1 which is oscillated by the laser beam oscillating means. A feeble beam condensing means 551 which is arranged between the laser beam oscillating means 53 and the objective condensing lens 541 and by which the pulse laser beam is condensed so that the substantial NA value of a spot of the laser beam which is oscillated from the laser beam oscillating means and enters the objective condensing means is≤0.02 is provided. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
