| 摘要 |
PROBLEM TO BE SOLVED: To adjust the resonance frequency of a piezoelectric thin film resonator in the atmosphere, and to suppress the occurrence of spuriousness due to adjusting. SOLUTION: A mass-adding resist film 19 for adding a mass is formed on a counter region E1 of a piezoelectric thin film resonator 1 contained in a wafer W, so that the resonance frequency F<SB>R</SB>of the piezoelectric thin film resonator 1, being initially surpassing a target frequency F<SB>T</SB>, comes to be the target frequency F<SB>T</SB>or lower. Then, the resist film 19 formed on the counter region E1 of the piezoelectric thin film resonator 1A is irradiated with electromagnetic waves so that the resist film 19 is ablated, for the resonance frequency F<SB>R</SB>to rise up to the target frequency F<SB>T</SB>. COPYRIGHT: (C)2008,JPO&INPIT
|
