Method And Apparatus For Drying Under Reduced Pressure Using Microwaves

摘要

An apparatus and a method for drying under reduced pressure using microwaves. The apparatus comprises a chamber ( 13 ) for housing an object ( 11 ), a depressurizing pump ( 22 ) connected to the chamber ( 13 ) for depressurizing the inside of the chamber ( 13 ), a microwave irradiating device ( 12 ) for irradiating microwaves to the object ( 11 ) in the chamber ( 13 ), an airflow generating device for generating an airflow in the chamber ( 13 ) by introducing a gas from the outside to the inside of the chamber ( 13 ), and a control device ( 35 ) for controlling the above components. The object ( 11 ) in the chamber ( 13 ) is dried at temperatures below a deterioration temperature of the object ( 11 ) by intermittent irradiation of the microwaves under reduced pressure while the airflow is generated around the object ( 11 ).