| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-mechanical element capable of reducing a using area and reducing cost. SOLUTION: This micro-mechanical element 30 has a substrate 10, a micro-mechanical structural body 50 formed on it and a cap substrate 10' bonded on a substrate front surface 15 to seal the micro-mechanical structural body. A surface contact 40 to electrically connect at least a part of the micro-mechanical structural body to the outside is provided on a substrate back surface 16. A wiring is constituted by electrically dividing the substrate 10 by filling an insulating material by forming a trench groove 2' by etching on the electrically-conductive substrate 10, and the micro-mechanical structural body and the surface contact are conducted through to each other. COPYRIGHT: (C)2008,JPO&INPIT |
