发明名称 IMAGE BINARIZATION PROCESSING METHOD, IMAGE PROCESSOR, AND COMPUTER PROGRAM
摘要 <P>PROBLEM TO BE SOLVED: To provide an image binarization processing method by which, even if shade of an electrode pad or a part of a probe trace is unclear, the probe trace can be surely and accurately recognized. <P>SOLUTION: This image binarization processing method is used to binarize an original image that an electrode pad on a substrate is picked up. The method includes an electrode image processing step wherein the original image is binarized by a first threshold to create a binarized image thereof, a contact trace area calculation step to calculate a contact trace area including a part which seems to include a trace of an object hitting the electrode, a contact trace image processing step wherein an original image of an area corresponding to the contact trace area obtained in the contact trace area calculation step is binarized by a second threshold different to the first threshold so as to create a contact trace area binarized image, and an image synthesizing step to synthesize the binarized image of the electrode and the contact trace binarized image by logical OR for each of corresponding pixels. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007311426(A) 申请公布日期 2007.11.29
申请号 JP20060137055 申请日期 2006.05.16
申请人 TOKYO ELECTRON LTD 发明人 SATO ATSUYA
分类号 H01L21/66;G06T1/00;G06T5/00 主分类号 H01L21/66
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