| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for affixing together two members having a micro-structural part with the mating surfaces in alignment while bubbles are prevented from intruding. SOLUTION: The device is composed of: (1) a first holder to hold a first member having a flat and smooth surfaceαand a micro-structural part a; (2) a second holder confronting the first holder, having a flat and smooth surfaceβand a micro-structural part b, and having a second member holding surface to hold a second member; (3) a position sensing mechanism to sense the positional relation between the first member and the second member; (4) an aligning mechanism to coordinate the positions of the first member and the second member; and (5) a vertically moving mechanism to move the first holder and/or the second holder, (6) wherein the second holder is made of a flexible material, (7) while the second member holding surface is embodied as a convex curved surface or a plane not parallel with the affixing surface of the first member, (8) in which the affixation is conducted in such a manner that the first holder and/or the second holder are moved in the direction of shrinking their mutual distance. COPYRIGHT: (C)2008,JPO&INPIT
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