CLEANING SHEET, CONVEYING MEMBER WITH CLEANING FUNCTION, AND CLEANING METHOD OF SUBSTRATE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a cleaning sheet excellent in foreign matter removal function and transportability, usable at a high temperature, and capable of preventing the operation availability of an apparatus and a conveying member having cleaning function. SOLUTION: The cleaning sheet has a cleaning layer containing a polyester and Vickers hardness of the cleaning layer is 20 or higher. COPYRIGHT: (C)2008,JPO&INPIT